Park Systems Corp. (140860)

Overview

Park Systems Corp., a pioneer in the field of nanoscale microscopy and metrology, specializes in the development, manufacturing, and sale of Atomic Force Microscopy (AFM) systems worldwide. Since its inception in 1997 and subsequent rebranding from PSS Corp. to Park Systems Corp. in March 2007, the company has solidified its position at the forefront of nanotechnology tools. Headquartered in Suwon, South Korea, Park Systems is dedicated to advancing research and surface analysis across various industries including semiconductor, polymer, metal and ceramic, thin film, life science, 2D-material, surface engineering, anisotropic films, photonics, and display sectors. Their robust product offerings are complemented by a suite of software solutions and specialized services aimed at pushing the boundaries of nanoscale measurement and analysis.

Products and Services

• Atomic Force Microscopy (AFM) Systems

  Park Systems offers a wide range of AFM systems catering to research, surface analysis, and in-line metrology needs. These systems are integral for advancing nanoscale science, allowing users to visualize, measure, and manipulate matters at the nanometer scale.

• Photomask Repair

  Providing state-of-the-art tools for photomask defect repair, essential for the semiconductor manufacturing process. These tools ensure the accuracy and integrity of photomasks, critical components in lithography for semiconductor device fabrication.

• Optical Profilometry

  A technique offered by Park Systems for non-contact measurement of the three-dimensional shape of micro and nano-scale features on a surface. This method is crucial for numerous applications in materials science, engineering, and quality control.

• Nano Infrared Spectroscopy Services

  Combining AFM’s high-resolution spatial mapping with infrared spectroscopy, Park Systems provides services for detailed chemical characterization at the nanoscale, enabling groundbreaking research in materials science and biology.

• Ellipsometry for Thin Film Characterization

  This non-destructive optical method allows for the precise measurement of the thickness and optical properties of thin films, essential for various applications in the semiconductor, photovoltaic, and optics industries.

• Active Vibration Isolation

  Advanced solutions to reduce environmental vibrations that can affect the performance of high-precision instruments like AFMs, thereby ensuring the accuracy and reliability of nanoscale measurements.

• Software Solutions
  • Park SmartAnalysis: A comprehensive data analysis tool tailored for the processing of AFM images and data.
  • SmartScan: An operating software designed to enhance AFM ease of use, enabling researchers to obtain high-quality data with minimal training.
  • SmartLitho: Focused on lithography applications, this software bridges the gap between nano-scale lithography planning and execution.